铍表面离子注入层硬度的研究

Ion-Implantation of Surface Layer of Be

摘要:

对金属铍进行了不同剂量的离子注入表面处理。测量了注入处理后的金属铍表面的显微硬度;将测量的硬度值,利用Jonsson硬度模型计算了注入表面层的硬度;分析了注入表面层的硬度值与注入剂量的关系及注入强化机理。结果表明,离子注入层硬度是铍本身硬度值的9倍。

关键词:离子注入 铍 显微硬度 表面层硬度

Abstract:

Ion-implantation has been carried out for the metal Be in different doses,and the surface microhardness has been measured after the ion implantation.The hardness of the surface layers ion-implanted has been calculated by the Jonsson hardness model from the measured hardness and analysed as a function of implanted doses for the harden mechanism of implantation.The results showed that the hardness of Be increased by a factor of 9 after ion-implantation.

Key words:ion-implantation Be microhardness surface-hardness,