金属硅化物的应用与发展

Development and Applications of Metal Silicides

摘要:

回顾了金属硅化物在电热元件、高温抗氧化涂层以及集成电路电极薄膜等功能元器件方面的应用、存在的问题和改进的措施，并介绍了高温结构材料的应用研究现状和发展趋势

Abstract:

The present status of metal silicides for use as heating elements, high temperature oxidation resistant coatings as well as thin films for largescale integrated circuit applications are reviewed. Some applications problems and solutions to them are discussed. Research and development of the metal silicides as a new type of high temperature structural materials are also overviewed.