TN384 O484
国家“863”!715-002-0110,国家自然科学基金!6973020
宋志棠 曾建明.不同工艺制备的铁电薄膜底电极Pt/Ti[J].稀有金属材料与工程,1999,(5):305~309.[Song Zhitang, Zeng Jianming, Gao Jianxia, Zhang Miao, Ling Chenglu. Pt/Ti Bottom Electrodes of Ferroelectric Thin Films Fabricated by Electron Beam Evaporating and DC-Sputtering[J]. Rare Metal Materials and Engineering,1999,(5):305~309.]
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