鼓泡法薄膜力学性能测试的研究现状

Current Status and Prospects of Bulge Experiments for Thin Film Behavior Testing

摘要:

对鼓泡法薄膜力学性能测试的现状做了评述，重点分析了该实验方法所用力学模型的最新进展，剖析了所涉及的制样方法和力学模型的特点及所存在的问题；对该方法的未来发展作了展望。

Abstract:

The current status of bulge experiments for testing mechanical properties of thin film is outlined in this article. Stressed is the status of the mechanical model and the manufacture of specimens used in the test, including their advantages and disadvantages. Moreover, the possible prospects of this test are overviewed.