AlN压电薄膜材料研究进展

The Research Progress of AlN Piezoelectric Thin Films

摘要:

AlN压电薄膜材料具有许多优异的物理化学性质，本文对该薄膜材料的发展，结构特征，制备方法进行了综述，并对其应用前景进行了展望。

Abstract:

AlN piezoelectric film has a lot of excellent physical chemistry properties.This discussion focus on the str uctural characters,pre-pared methods and applied prospect o f AlN piezoelectric films.