钛表面原位生长钛酸锶钡陶瓷膜

In-situ Growth of Barium Strontium Titanate (BST) Ceramic Film on Titanium Substrate

摘要:

用微等离子体氧化法在钛金属基体上制备钛酸锶钡(BST)陶瓷膜。讨论了Ba／Sr的摩尔比对陶瓷膜相组成的影响，并利用X射线衍射(XRD)、扫描电镜(SEM)和电子探针(EPMA)等测试手段对陶瓷膜的相组成、形貌特征和元素分布进行了分析。结果表明，在所选定的工艺参数条件下可得到钛酸锶钡陶瓷膜，膜层由接近于纯相的钛酸锶钡构成，表面相对较为平整，各元素在陶瓷膜层中分布均匀，无梯度变化。

Abstract:

Barium strontium titanate (BST) ceramic film is prepared on titanium substrate by micro-plasma oxidation. It is discussed that the influence of Ba/Sr molar ratio on ceramic film composition. The composition, morphology and element distribution of ceramic film are analyzed. It is indicated that the BST ceramic film with relatively smooth surface and homogeneous element composition can be formed in the condition of selected processing parameters.