TN304.05
国家自然科学基金资助项目(19874022),广西自然科学基金资助项目(9912004)
陶甫延 王敬义 等.反应溅射中靶面附近的粒子输运研究[J].稀有金属材料与工程,2003,(2):99~102.[Tao Futing, Wang Jingyi, He Xiaoming, Wang Yu, Ying Sheng. Study on Particle Transport Near the Target Surface in Reactive Sputtering[J]. Rare Metal Materials and Engineering,2003,(2):99~102.]
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