网状阴极辉光放电法在钛合金表面渗镀Ta的应用

Application of Net-shape Cathode Glow Discharging on the Surface of Titanium Alloy by Tantalizing

摘要:

设计了一种网状阴极溅射靶，它是由多个空心阴极并列交叉组合而成。结构简单，溅射率高。将其用于双层辉光主子渗钽中，在钛合金（Ti-6Al-4V）表面可形成纯Ta沉积层和合金扩散层的复合层组织，进一步提高了钛合金的耐蚀性，是一种高耐蚀合金。

Abstract:

A new net-shape cathode sputtering target which has a simple structure and a high sputtering rate was put forward. The multiple-structure made of alloying and coating layers of tantalum was achieved on the surface of TC4 by using this method in double glow surface alloying process. The tantalized samples were investigated by SEM ,XRD and electrochemical corrosion method .