退火对TbCo薄膜结构和磁性能的影响

Effect of Annealing on Magnetic Properties and Structures of TbCo Thin Films

摘要:

研究了真空退火对TbCo薄膜结构和磁性能的影响。结果表明：薄膜从溅射态的非晶薄膜转化为退火态的微晶薄膜，并以(100)面择优取向，其c轴平行于基片。在真空退火不改变TbCo薄膜的成分的条件下，发现TbCo薄膜从溅射态的垂直磁化膜转化为退火态的面内膜。

Abstract:

The magnetic properties and structu res of sputtered and annealed TbCo th in films have been studied.The resul ts show that the film will be changed from the amorphous to the polycrystalline,a nd oriented with(100)plane.The contents of Tb and Co for the film are not almost changed after vacuum annealing,and a change of the easy axis of the film from out-of-plane to in-plane is found.