氧化铟气敏材料的制备与特性

Preparation and Character of In_2O_3 Gas Sensing Materials

摘要:

用化学沉淀法合成微细的氧化铟气敏粉体，选用几种稀有贵金属掺杂氧化铟粉体，用D／maxrA X射线衍射仪测定粉体相结构，用RQ-2型气敏特性测试仪测试氧化铟气敏元件的气敏特性，绘制了掺杂后氧化铟粉体对几种气体的灵敏度．温度曲线。结果表明，氧化铟气敏材料电阻值适中，响应恢复快，气体灵敏度高，可对多种气体实行专一检测或同时检测。

Abstract:

Pure Indium oxide powder was synthesized by chemical precipitation. In2O3 based gas sensing materials doped with noble metal catalyst were made by impregnation. The phase composition of powders was determined with XRD. The gas sensitivity of these side-heated gas sensors were tested in static state by using RQ-2 gas sensitive behaviour analyzer and ploted the curves of gas sensltivity against temperature for several kinds of gas. The results showed that In2O3 based gas sensors can be used to detect gas selectively or generally because of its high gas sensitivity, proper resistance and quick response and recovery.