TG146.4
国家自然科学基金资助项目(59931010)
王飞 徐可为.磁控溅射Cu膜屈服强度的有限元计算[J].稀有金属材料与工程,2004,33(11):1203~1205.[Wang Fei, Xu Kewei. The Yield Strength Calculated by Finite Element Method for Sputtered Cu Film[J]. Rare Metal Materials and Engineering,2004,33(11):1203~1205.]
DOI:[doi]