脉冲直流PCVD制备Ti（C，N）薄膜及其组织结构分析

Microstructure of Ti(C,N) Films Coated by Pulsed-d.c PCVD

摘要:

用工业型脉冲直流等离子体化学气相沉积(PCVD)设备，针对不同混合气体CH4所占比例，在H13模具钢表面沉积了Ti(C，N)薄膜。用SEM观察薄膜断口形貌，用XRD及XPS分析薄膜相组成和价态。结果表明：一定量碳元素的加入，抑制了TiN薄膜中柱状晶的生长，并且阻止了TiN晶粒的长大。Ti(C，N)的相结构可能为TiN和TiC两相混合，但在C(或N)含量较低的膜层中，c(或N)原子也会以置换的方式存在于TiN(或TiC)单相组织中。

Abstract:

Using pulsed DC plasma chemical vapor deposition technology, the Ti(C, N) films on H13 steel were prepared under different CH4 atmospheres. The cross-sections of the Ti(C,N) films were investigated by SEM, and the elements in the film were characterized by XRD and XPS .The results show that addition of C to TiN film prevents the growth of TiN grains and development of column structure. The Ti(C, N) can be composed of two phases of TiN and phase TiC.