射频磁控溅射制备TiO2光催化薄膜的表征

Characterization of TiO2 Photocatalytic Thin Films Prepared by Radiofrequency Sputtering

摘要:

在不同的Ar和O2气流量比下，利用射频磁控溅射技术在载波片上制备了TiO2薄膜。利用X射线衍射(XRD)，原子力显微镜(AFM)，拉曼光谱和UV-VIS-NIR分光光度计等技术对薄膜进行了表征。结果表明在Ar：O2=20sccm：5sccm下制备的薄膜具有较高的光催化活性。

Abstract:

TiO2 thin films were prepared on microscope glass slides by radiofrequency magnetron sputtering method under different flow ratios of Ar and O2 gases. The films were characterized by X-ray diffraction (XRD), atomic force microscope (AFM), Raman spectroscopy and UV-VIS spectrophotometer. The results indicated that the film prepared under the flow ratio of ArO2=20 sccm5 sccm has a higher photocatalytic activity.