磁控溅射ZrSiN涂层对钛瓷结合强度的影响

The Effect of ZrSiN Diffusion Barrier on the Bonding Strength of Titanium Porcelain

摘要:

探讨采用射频磁共溅射氮硅锆(ZrSiN)涂层作为扩散阻挡层(钛与瓷间的中间层),增强钛/瓷结合强度的可行性。结果表明:ZrSiN是含纳米结晶相ZrN和非晶相SiNx的纳米复合扩散阻挡层。无ZrSiN扩散阻挡层的钛经热循环后表面明显氧化,有ZrSiN扩散阻挡层处理后的钛表面经热循环后没有氧化钛,只有锆、硅、氮和氧元素,表明ZrSiN扩散阻挡层可有效阻挡钛在瓷烧结温度下氧化。三点弯曲试验表明ZrSiN涂层还可提高钛瓷结合强度。高硅含量的ZrSiN涂层处理的钛瓷结合强度更高,这与非晶相SiNx增多有关。

Abstract:

ZrSiN film was selected as diffusion barrier and sputtered on polished titanium substrate with RF reactive magnetron sputtering. XRD, XPS and SEM results reveal that the ZrSiN diffusion barrier is a nano-composite that consists of nano-crystallite ZrN and amorphous-like SiNx phase. The results also show that in the surface of Ti substrate without ZrSiN diffusion barrier, there is Ti oxides, however, in the surface of Ti substrate with ZrSiN diffusion barrier, there is not Ti oxides and does only Zr, Si, N and O. This proves that ZrSiN diffusion barrier protect the Ti substrate against oxidation. The three-point bending test results prove that ZrSiN diffusion barrier significantly improves the bonding strength between Ti substrate and porcelain. The ZrSiN diffusion barrier with high Si content results in higher adhesion strength of the Ti/porcelain. This indicates that amorphous Si-N phase of ZrSiN diffusion barrier improves its barrier property.