PZT铁电薄膜电极材料研究进展

Electrode of PZT Thin Films: Review of Materials, Structures, and Properties

摘要:

近几年,PZT铁电存储器的商业应用受到了广泛关注,但PZT电容器的疲劳现象已成为其应用的严重障碍,变换电极是改善PZT电容器抗疲劳特性的有效方法.系统地介绍了PZT铁电薄膜用电极材料的结构、性能及其特点,比较了不同电极材料对PZT铁电薄膜结构及铁电性能的影响,并对导电金属氧化物电极改善抗疲劳特性的机制进行了一定的分析,提出了电极材料的主要问题和发展方向.

Abstract:

An increasing interest in PZT ferroelectric memories is presented for their commercial applications in recent years, but fatigue behavior of PZT capacitors has been a critical problem in commercial applications for FRAM devices. Changing of electrode materials of PZT capacitors is an effective method to overcome the fatigue behavior of PZT capacitors. In this paper the structure, properties and characteristics of electrode materials for PZT thin films are introduced systematically. The effect of different electrode materials on structure and ferroelectric properties of PZT thin films are compared. The mechanism how to improve the ferroelectric properties of PZT capacitors via conducting metal oxide electrodes are discussed. The main problems and directions of development of electrodes are presented.