唐武,邓龙江,徐可为.金属薄膜电阻率与表面粗糙度、残余应力的关系[J].稀有金属材料与工程,2008,37(4):617~620.[Jian Lu, Tang Wu, Deng Longjiang, Xu Kewei, Jian Lu. Relationship between Resistivity of Metallic Film and Its Surface Roughness, Residual Stress[J]. Rare Metal Materials and Engineering,2008,37(4):617~620.]
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