不同氮分压下磁控溅射ZrN对钛/瓷结合的影响

Influence of N2 Partial Pressure of Zirconium Nitride by Magnetron Sputtering on the Bonding Strength of Titanium/Porcelain

摘要:

探讨不同氮分压下磁控溅射氮化锆(ZrN)涂层对纯钛与低熔瓷粉(Vita钛瓷粉系统)结合强度的影响。60个纯钛基片随机分为1个对照组和3个实验组。实验组分别在不同氮分压下(Ta组1.0×10-2 Pa，Tb组5.0×10-2 Pa和Tc组10.0×10-2 Pa)溅射沉积ZrN涂层。纯钛试样经表面处理后在烤瓷炉中进行烧结。用XRD检测到ZrN立方新相。万能试验机测试钛瓷试样三点抗弯强度，对照组为 (26.67 ± 0.88) MPa， 实验组分别为：Ta (49.41 ± 0.55) MPa，Tb (54.55 ± 0.69) MPa和Tc (46.24 ± 0.53) MPa，四组间差别均有统计学意义(P < 0.05)。SEM观察表明，实验组钛/瓷结合良好，钛基底残留的瓷断面数量较多，面积较大。不同氮分压下溅射沉积的ZrN涂层对钛/瓷结合的增强程度有所不同，5.0×10-2 Pa下钛/瓷结合增强最为明显

Abstract:

The influence of zirconium nitride (ZrN) deposited by magnetron sputtering under different N2 partial pressure on the bonding strength of titanium porcelain was investigated. 60 commercially pure cast titanium specimens were randomly subjected to 1 contrast group and 3 test groups, named Ta, Tb and Tc. All test groups were treated with ZrN deposited under different N2 partial pressure by magnetron sputtering (group Ta 1.0×10-2 Pa, group Tb 5.0×10-2 Pa and group Tc 10.0×10-2 Pa). The pure titanium specimens were sintered after surface treatment. The compositions of the deposits were analyzed by X-ray diffraction (XRD). A universal testing machine was used to perform the three-point bending test to evaluate the bonding strength of Ti and porcelain. The microstructure of ZrN, the interface of Ti/porcelain and the fractured Ti surface were observed by scanning electron microscopy (SEM) and digital microscope. The XRD results prove that the ZrN deposits are cubic crystalline phases. The bonding strength of Ti and porcelain of each group are as following: group contrast (26.67±0.88) MPa, group Ta (49.41±0.55) MPa, group Tb (54.55±0.69) MPa and group Tc (46.24±0.53) MPa. Statistical differences were recorded (P<0.05). The results of SEM show that the Ti/porcelain interface of contrast group possesses pre-cracks, while samples of test group have better combinations. ZrN film deposited by magnetron sputtering can enhance Ti/porcelain bonding. ZrN films deposited under the N2 partial pressure of 5.0×10-2 Pa bring the highest Ti/porcelain bonding strength