Based on the sputtering theory and molecular thermodynamics theory, a mediated composition model of SmCo-based multinary alloy films was established, and the effect of sputtering parameters on the film composition was discussed. Subsequently, the SmCo-based multinary alloy films were deposited on Si substrates by magnetron sputtering from Sm(Co0.62Fe0.25Cu0.1Zr0.03)7.5 alloy target. The composition of the films prepared by different sputtering parameters was measured. The results show that the dependence of the film composition on sputtering parameters observed from the model agrees well with the experiment results, which gives a favorable support to the acquired model
彭 龙,李元勋. SmCo基多元合金薄膜的成分调控研究[J].稀有金属材料与工程,2012,41(6):1055~1059.[Peng Long, Li Yuanxun. Investigation on the Mediated Composition of SmCo-based Multinary Alloy Films[J]. Rare Metal Materials and Engineering,2012,41(6):1055~1059.] DOI：[doi]