MOCVD方法制备BeH2薄膜

Preparation of Beryllium Hydride Films by MOCVD

摘要:

采用二叔丁基铍 (t-Bu2Be·Et2O) 蒸气在加热的衬底上以热解的方式制备透明的BeH2薄膜。通过加热BeH2薄膜并借助氢气气相色谱仪探测到了薄膜释放的H2。X射线光电子能谱分析表明，薄膜表面层几乎完全被氧化成BeO。傅里叶变换红外光谱显示存在强烈的BeHBe键弯曲振动吸收峰。因此，二叔丁基铍在加热的基片上以分解的方式能够制备出BeH2薄膜

Abstract:

Transparent beryllium hydride (BeH2) films were prepared by the pyrolysis of di-t-butylberyllium etherate (t-Bu2Be·Et2O) under low pressure using metalorganic chemical vapor deposition (MOCVD) apparatus. The films were heated to 300 ℃ for dehydrogenation, and the released H2 was detected by gas chromatography. The XPS analysis shows that the surface layer of BeH2 film is BeO. The IR spectrum indicates that there exists Be-H-Be bend vibration