升温速率对烧结ITO靶材密度和组织的影响

Effects of Heating Rate on Density and Microstructure of Sintering ITO Targets

摘要:

采用化学共沉淀法制备ITO粉体前驱物，在600 ℃煅烧粉体前驱物4 h，得到粒径为20~30 nm的ITO粉体。添加1%的聚乙烯醇(PVA)造粒，模压成型制备ITO靶材素坯，设置不同的升温速率，在1550 ℃氧气氛下烧结素坯，得到ITO靶材。研究了烧结过程升温速率对ITO靶材密度和微观组织的影响。结果表明，在低温阶段（0~500 ℃）升温速率为3 ℃/min，高温阶段（500~1550 ℃）升温速率为8 ℃/min时，ITO靶材相对密度为99.58%，孔洞极少，近乎完全致密，且靶材宏观上无裂纹。

Abstract:

ITO powder precursors were prepared by chemical co-precipitation and then they were calcined at 600 °C for 4 h to obtain ITO powder with average particle size of 20~30 nm. 1%PVA was added to the ITO powder for granulation, and then the green compacts of ITO targets were prepared by a press forming method. Different heating rates were set, and then the ITO targets were produced by sintering at 1550 °C in oxygenated atmospheres. The effects of heating rate on relative density and microstructure of ITO target were studied during sintering process. The results show that when the heating rates are 3 °C /min (0~500 °C) and 8 °C /min (500~1550 °C), the heating system is better. The relative density of ITO target is 99.58%, the pores are hardly seen and the target is nearly fully densitified, in addition, no crack is observed from the macro perspective.