钛表面纳米复合Si-C-N超硬薄膜的结构与性能

Microstructure and Properties of Si-C-N Nanocomposite Films on Titanium Substrate

摘要:

采用电弧增强磁控溅射(AEMS)技术在钛表面制备纳米复合Si-C-N超硬薄膜，研究薄膜的显微结构、相组成、硬度、韧性、摩擦学行为和耐蚀性能。结果表明，薄膜形成了C–C、C=C、N–C以及Si–C非晶复合组织结构。薄膜的硬度为(38.2±4.1) GPa，断裂韧性为(3.68±0.32) MPa·m1/2。薄膜的摩擦系数为0.23左右，具有良好的抗摩擦磨损能力。沉积Si-C-N薄膜的TA2试样在25 ℃、3.5%NaCl水溶液中的腐蚀速率为0.000 125 mm·a-1，是纯TA2的12.5%，具有良好的耐蚀性能。

Abstract:

Si-C-N nanocomposite films on titanium substrate were prepared by arc enhanced magnetron sputtering (AEMS). The microstructure and properties of Si-C-N nanocomposite films were investigated. The results show that a nanocomposite of amorphous C–C, C=C, N–C and Si–C matrix is formed for the films. The microhardness of the films is (38.2±4.1) GPa. The fracture toughness of the films is (3.68±0.32) MPa·m1/2. Si-C-N nanocomposite films have a low friction coefficient of 0.23 at room temperature. The corrosion rate of TA2 with Si-C-N nanocomposite films is 0.000 125 mm·a-1 in 3.5%NaCl water solution at 25 oC, which is 12.5% of that of pure TA2 under the same condition. The TA2 with Si-C-N nanocomposite films has better wear resistance and corrosion resistance than pure TA2.