化学法动态热处理制备LZO缓冲层

Deposition of La2Zr2O7 (LZO) Buffer Layer by a Reel-to-Reel Method

摘要:

对采用化学溶液沉积技术动态热处理制备La2Zr2O7(LZO)缓冲层进行了研究。结果显示，制备长样品时，侧向进气更有利于驱散热解气体，降低样品织构的不均匀性。当侧向进气方向与样品表面法线方向夹角较小时，更有利于提高LZO缓冲层的织构特性。LZO缓冲层的织构和表面形貌受样品移动速度影响的主要原因是样品移动速度的变化直接改变了样品的热处理时间。优化动态热处理过程后制备出的LZO缓冲层表面致密，LZO缓冲层具有锐利的立方织构，织构锐利度与金属基带织构相当

Abstract:

Deposition of La2Zr2O7 (LZO) buffer layer by a reel-to-reel method was studied. The results indicate that it is a better way for fabricating a long tape that Ar-4%H2 mixed gas flows along the transversal direction of NiW substrate, and the pryolysed gases could be dissipated rapidly by this way, and the texture homogeneity of each part in the LZO film can be improved. It is also found that a small angle between the gas flow direction with the normal direction of the sample is beneficial to improve the texture of LZO film. The influence of the sample moving speed is due to the change of heat treatment time. After the treatment is optimized, a smooth and dense LZO film with sharp texture is deposited on a NiW substrate by a reel-to-reel method, and the texture sharpness of LZO film is similar to that of NiW substrate