空心阴极辅助多弧镀(Ti,Al)N涂层物相组成及性能

The properties and phase composition of (Ti,Al)N coating prepared by hollow cathode assisted multi-arc plating technology

摘要:

摘 要:采用空心阴极离子束辅助多弧离子镀技术，通过变换靶材中Ti-Al比例分别为30%Al、50% Al和70% Al沉积了(Ti,Al)N涂层。利用XRD、激光共聚焦显微镜、材料表面微纳米力学测试系统等检测了涂层的质量和性能。研究了涂层的相组成、表面粗糙度、摩擦系数和硬度、以及涂层的抗氧化性能等随靶材成分比例改变而变化的规律。结果表明，当靶材中Al含量为50%时，沉积层相组成以Ti1-xAlxN为主，涂层粗糙度和摩擦系数为最小分别为0.3188和0.6074，而硬度值最高为34.19GPa；加热温度低于800℃时涂层物相组成没有发生明显变化，900℃是涂层产生开裂基体被氧化；空心阴极离子束辅助沉积时能够形成 “混合界面”，并减轻涂层表面“大颗粒”现象。

Abstract:

(Ti,Al)N thin films were prepared under different Ti/Al mosaic target(30%Al、50%Al、70%Al) by multi-arc ion plating technology which is in hollow cathode electron beam assisted deposition situation.The quality and properties were detected by XRD、CLSM and universal nano/micro material tester.The effects of Ti/Al target on phase composition 、surface roughness、friction coefficient、hardness and oxidation resistance were analyzed.The results show that coatings produced by 50%Al target give priority to Ti1-xAlxN phase composition and show minimum surface roughness(0.3188), friction coefficient(0.6074), maximum hardness (34.19GPa).The coating show no obvious change on phase composition when heating temperature lower than 800℃. At 900℃ substrate is oxidized due to the coating cracks. "hybrid interface" can form when hollow cathode electron beam assisted deposition,and “surface roughness” can also be reduced under this condition.