钨丝-CVD钨复合材料制备及性能分析

Preparation and Performance Analysis of Tungsten Wire-CVD Tungsten Composite Material

摘要:

采用自制实验装置，通过化学气相沉积钨过程中间断缠绕钨丝，得到钨丝-CVD钨复合材料。测试分析了材料的密度、成分及显微硬度；通过压溃试验计算出钨复合材料的压溃强度，通过拉伸试验和三点弯曲试验分别绘出拉伸和弯曲曲线。实验结果表明，化学反应温度控制在550 ℃，WF6和H2流量分别控制在2 g/min和1 L/min时，可得到没有孔洞的致密涂层。与相同工艺条件下不缠钨丝CVD钨样品相比，钨丝-CVD钨复合材料仍具有较高的纯度、致密度，显微硬度大致相同，而压溃强度、抗拉强度和抗弯强度大大提高

Abstract:

A kind of composite material, tungsten wire-CVD tungsten was fabricated by winding tungsten wire on the substrate periodically in the CVD process using the homemade CVD device. The density, composition and micro-hardness were tested and analyzed; the crushing strength was calculated according to crushing test; the tensile and bending curves were obtained according to tensile test and three-point bending test. The results show that the dense coating without holes can be obtained when the chemical reaction temperature is controlled at 550 oC and the flows of WF6 and H2 are controlled at 2 g/min and 1 L/min, respectively. Compared with the CVD tungsten samples without wound tungsten wire under the same process conditions, the tungsten wire-CVD tungsten composite materials still possesses high purity and density, the similar micro-hardness, but the crushing strength, the tensile strength and the bending strength are improved greatly