双(2,2,6,6-四甲基-3,5-庚二酮酸)钯(Ⅱ)的制备及成膜性能

Synthesis and Film Forming Performance of Bis( 2,2,6,6-Tetramethyl–

摘要:

以二氯化钯和2,2,6,6-四甲基-3,5-庚二酮为原料，在甲醇中合成了一种新的β二酮前驱体-双(2,2,6,6-四甲基-3,5-庚二酮酸)钯(Ⅱ)。 通过元素分析、红外光谱、核磁共振氢谱及单晶X射线衍射等技术对合成的前驱体进行了结构表征。热重-差热分析表明，在N2气氛中，当温度升到291 ℃时，前驱体基本挥发完全。采用合成的前驱体通过金属有机化学气相沉积(MOCVD)技术在石英上沉积制备钯薄膜，利用XRD和AFM分析手段对薄膜的结构和表面形貌进行了表征。结果表明，所得到的薄膜纯净，无其他杂质存在，薄膜表面连续、致密

Abstract:

A new precursor, bis(2,2,6,6-tetramethyl-3,5-heptanedionato)palladium was synthesized from PdCl2 and Hthd in methanol. The structure of bis(2,2,6,6-tetramethyl-3,5-heptanedionato)palladium was characterized by element analysis, infrared spectroscopy, 1HNMR spectroscopy and single crystal XRD analysis. Thermal decomposition properties were studied by thermogravimetric analysis under nitrogen atmosphere. The results show that bis(2,2,6,6-tetramethyl-3,5-heptanedionato)palladium is an ideal precursor for it is completely volatiled at 291 oC. The palladium films were prepared from the synthesized precursor by metal organic chemical vapor deposition (MOCVD) on quartz. The structure and morphology of palladium films were studied by XRD and AFM, respectively. The results indicate that the pure palladium films are successfully prepared and the surface of films is continuous and compact