TaMoN复合膜的微结构、力学性能与摩擦性能

Microstructures, Mechanical and Friction Properties of TaMoN Composite Films

摘要:

采用多靶磁控溅射技术，根据不同Mo靶功率制备一系列不同Mo含量的TaMoN复合膜。利用X射线衍射仪、纳米压痕仪、高温摩擦磨损仪、扫描电子显微镜及其配套的能谱仪研究复合膜的相组成、力学性能、室温和高温下的摩擦性能。结果表明，TaMoN复合膜的微结构是由面心立方、密排六方与底心斜方组成的多相结构；TaMoN复合膜的硬度比TaN单层膜的硬度高，且随着Mo含量的增加先升高后降低，在Mo含量为52.68 at%时达到最大值，为33.9 GPa；Mo元素的添加可以有效改善TaN薄膜在常温和高温下的摩擦性能，通过对磨痕的分析，详细解释了TaMoN复合膜具有优异的减摩性能的原因。

Abstract:

A series of TaMoN composite films with different Mo contents were fabricated by a magnetron sputtering technique. The microstructures, morphology, phase composition, mechanical and friction properties of the films were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM) and equipped EDS, nano-indentation, and CSM high-temperature ball-on-disc tribo-meter. The results show that the microstructure of TaMoN composite films is a poly-phase structure consisting of cubic, hexagonal and orthorhombic structure by adding Mo element to TaN film. The hardness of TaMoN composite film is higher than that of TaN monolayer film due to the solid solution strengthening. The friction coefficients of TaMoN films at room and high temperatures are lower than that of TaN film, and the reasons were analyzed based on the morphology and wear tracks formed at different temperatures.