纯相磷酸铁锂PLD靶材合成和表征

Synthesis and Characterization of Pure LiFePO4 Target for Pulsed Laser Deposition

摘要:

本研究着眼于确定制备纯相LiFePO4脉冲激光沉积靶材的合成条件。通过TG-DTA实验分析合成过程，XRD检测确定晶相，SEM观察表面形貌。结果表明，采用液相法在800 ℃、通有氩气（93%）和氢气（7%）的混合气体中焙烧制得纯相的LiFePO4粉末，经压合焙烧获得了纯相、高结晶度、大晶粒的LiFePO4靶材。利用脉冲激光技术沉积LiFePO4薄膜，薄膜结构致密，晶粒粒径达纳米级别

Abstract:

The synthesis conditions of pure phase LiFePO4 target have been studied. The synthesis process was analyzed by TG-DTA, the crystal phase was examined by XRD and the surface morphology was observed by SEM. The results indicate that the pure phase of LiFePO4 sample is obtained in solution route by calcining at 1073 K under Ar (93%) and H2 (7%) mixture gas flow, and then it is made as the target with high crystallinity and large grains. LiFePO4 film can be prepared by pulsed laser deposition. The film shows a dense structure, and the grain size is achieved at the nanometer level