多层及交替多层NdFeB/Nd薄膜的磁性能研究

Study on Magnetic Properties of Multilayer and Alternative Multilayer NdFeB/Nd Thin Films

摘要:

采用磁控溅射法制备了两组薄膜，经650℃退火处理后，对样品进行了XRD和VSM测试分析。结果表明：对于Mo/Nd/NdFeB/Nd/Mo多层薄膜，当NdFeB/Nd厚度比为6/5时，薄膜的矫顽力最好，平行和垂直方向的矫顽力分别为14.5kOe和10.5kOe；对于Mo/[NdFeB/Nd]n/Mo(n=2,5,8,10；NdFeB/Nd厚度比为6/5 )交替多层薄膜，当n为8时，薄膜具有最好的磁性能，平行和垂直方向的矫顽力分别为21.3kOe和16.7kOe；对于NdFeB/Nd厚度比均为6/5的薄膜，交替多层膜的综合磁性能高于多层膜。

Abstract:

Two types of thin films were deposited by the magnetron sputtering method. After annealing at 650 ℃, the samples were tested and analyzed by XRD and VSM respectively. The Mo/Nd/NdFeB/Nd/Mo multilayer thin films with the thickness ratio of NdFeB/Nd=6/5 show high coercivity. The parallel and perpendicular coercivity of multilayer films were 14.5kOe and 10.5kOe respectively. The Mo/[NdFeB/Nd]n/Mo (n=2,5,8,10,NdFeB/Nd=6/5) alternative multilayer thin films with n=8 show good hard magnetic properties .The parallel and perpendicular coercivity of alternative multilayer thin films were 21.3kOe and 16.7kOe respectively. The magnetic properties of the alternative multilayer film with thickness ratio of NdFeB/Nd=6/5 was enhanced in comparison with multilayer film.