沉积温度对化学气相沉积铼涂层性能的影响

Effect of Deposition Temperature on Properties of Rhenium Coatings Prepared by Chemical Vapor Deposition

摘要:

利用五氯化铼热分解反应,采用冷壁式现场氯化化学气相法在钼基体沉积铼涂层,分析不同沉积温度对铼涂层的物相组成、沉积规律、表面形貌、密度和硬度的影响。实验结果表明：沉积所得均为纯铼涂层,晶粒生长方向均以(002)晶面为主；随着沉积温度的上升,铼涂层的沉积速率和沉积效率大幅提升,表面形貌由复杂多面体态变为六棱锥状；涂层组织致密,相对密度最高可达99.9%,维氏硬度随温度升高而升高,最高达610。

Abstract:

The rhenium coatings were prepared by cold-wall chemical vapor deposition approach on the molybdenum matrix using ReCl₅ heat decomposition reaction. The effect of deposition temperature to phase composition, deposition rule, surface morphology, density and hardness were studied. The results show that all of as-parpered coatings have a strong preferential growth orientation of (002). With the increasement of deposition temperature, the deposition rate and efficiency rapidly increase. Meanwhile, the topography of CVD Re coatings change from complicated polyhedron to hexagonal pyramid. All the coatings are quite dense and the relative density can reach up to 99.9%. Vickers hardness increase with the deposition temperature and it can be up to 610.