多弧离子镀Ti-Al-Zr-Cr-N系双层膜的结构与力学性能

Microstructure and Mechanical Properties of Ti-Al-Zr-Cr-N Bilayer Films Deposited by Multi-arc Ion Plating

摘要:

采用多弧离子镀技术和Ti-Al-Zr合金靶及Cr单质靶,在WC-8 %C_O硬质合金基体上制备了(Ti, Al, Zr) N/(Ti, Al, Zr, Cr) N和CrN/(Ti, Al, Zr, Cr) N两种四元双层氮化物膜。利用扫描电镜(SEM)、电子能谱仪(EDS)和X射线衍射(XRD)分析两种双层膜的微观组织、成分和结构；利用划痕仪和显微硬度计对比两种双层膜的力学性能。结果表明,获得的两种双层膜均具有B1-NaCl型的TiN面心立方结构；双层膜的组织均是典型的柱状晶结构；沉积偏压为-50 ~ -200 V时,双层膜的力学性能均优于(Ti, Al, Zr, Cr) N单层膜,并与Ti-Al-Zr-Cr-N系梯度膜的力学性能相当,同时(Ti, Al, Zr) N/(Ti, Al, Zr, Cr) N双层膜可获得更高的硬度(最高值为Hv_0.01 4100),而CrN/(Ti, Al, Zr, Cr) N双层膜可获得更强的膜/基结合力(所有值均大于200 N)。

Abstract:

The (Ti, Al, Zr) N/(Ti, Al, Zr, Cr) N and CrN/(Ti, Al, Zr, Cr) N four-component bilayer nitride films were deposited on cemented carbide (WC-8 %C_O) substrates by multi-arc ion plating technique using the combined Ti-Al-Zr alloy and pure Cr targets. The morphology, composition and crystalline structure of two bilayer films were analyzed by scanning electron microscopy (SEM), energy disperse X-ray spectroscopy (EDS) and X-ray diffraction (XRD). Scratch test and Vickers microindentation were used to compare the mechanical properties of two bilayer films. It is shown that the two prepared bilayer films are still the TiN (B1-NaCl) face-centered cubic structure. The cross-sectional morphologies reveal the typical columnar crystal structures. As the bias voltages vary from -50 to -200V, the mechanical properties of two bilayer films are better than those of the (Ti, Al, Zr, Cr) N monolayer films and almost close to those of the Ti-Al-Zr-Cr-N gradient films. The microhardness of the (Ti, Al, Zr) N/(Ti, Al, Zr, Cr) N bilayer film is more excellent than that of the CrN/(Ti, Al, Zr, Cr) N film (max. Hv_0.01 4100). However, the adhesive strength of the CrN/(Ti, Al, Zr, Cr) N bilayer film is superior to that of the (Ti, Al, Zr) N/(Ti, Al, Zr, Cr) N film (all > 200 N).