Effects of Deposition Temperature on the Structure and Hardness of BN Films Prepared by a Gradient Temperature Method

摘要:

采用温度梯度法，通过MW-ECR射频磁控溅射在硅片基底上制备了六方和立方混合的氮化硼薄膜。研究了薄膜的键结构，化学成分和力学性能。结果显示，对于氮化硼立方相的出现存在温度阈值，薄膜的硬度随沉积温度提高而提高。相对于传统薄膜制备方法，温度梯度方法具有更高的效率。

关键词:氮化硼薄膜;溅射;温度梯度法;硬度

Abstract:

Adopting a gradient temperature method, hexagonal-cubic mixed boron nitride films were synthesized by MW-ECR radio frequency (RF) magnetron sputtering. The binding structure, the chemical composition, and the mechanical property of the films were investigated. The results show that there is a temperature threshold of the appearance of cubic BN film, and the hardness of the film increases with the increase of deposition temperature. Compared to the conventional methods the gradient temperature method is more efficient.

Key words:boron nitride film; sputtering; gradient temperature; hardness