低温等离子复合技术制备氧化铝阻氚涂层的研究

Preparation of Alumina Coatings as TritiumPermeation Barrier by a composite Treatment of low temperature plasma

摘要:

采用低温等离子体复合技术在不锈钢基体上制备了氧化铝阻氚涂层,先后经过磁控溅射镀铝,热处理及氧离子注入。利用XRD、SEM、EDS、AES对涂层进行了相结构、表面形貌、成分、元素分布等分析,并进行了划痕实验、抗热震性能及阻氚性能测试,结果表明：磁控溅射获得了高质量的铝涂层,热处理后形成了FeAl合金过渡层。在离子注入中,当注入剂量不变电压增加时,离子注入深度增加而氧元素分布梯度减少；当注入剂量达到8×10₁₇ ions/cm₂以上时,氧元素分布变得均匀。所获得的氧化铝涂层具有较好膜基结合力、抗热震性能及阻氚性能。经过叠加电压注入且剂量达到8×10₁₇ ions/cm₂的膜层具有最好的阻氚性能,在600_oC能使不锈钢的氚渗透率降低3个数量级。

Abstract:

In this study, the alumina coatings as tritium permeation barrier were successfully prepared on stainless steel bulk by composite low temperature plasma method of magnetron sputtering, heat treatment and O ion implantation. The phases, surface morphologies, chemical composition and O distribution of the coatings were characterized by XRD, SEM, EDS and AES individually,and after analyzing through scratch adhesion test, thermal shock resistance test and tritium permeability test. The results show that the Al coatings deposited by magnetron sputtering is well, and Fe-Al alloys interlayer was formed after heat treatment. In O ion implantation process, the oxygen depth deepened and the oxygen density gradient decreased with higher accelerating voltage at definite doses, meanwhile it can be seen that 8×10₁₇ ions/cm₂ is the crucial dose, above which ion implantation the oxygen density was more homogeneous. After a series tests, the obtained coatings has the good performance with film-substrate cohesion, thermal shock resistance and the tritium permeation resistance, and the coatings, which were treated by superposition at 8×10₁₇ ions/cm₂doses, have the best tritium permeability resistance, and it was improved 3 orders of magnitude high than the stainless steel bulk.