成膜时外加稳恒磁场对Fe-Ga-Al-Y磁致伸缩薄膜磁性能的影响

Effect of Static magnetic field applied during deposition on magnetic properties of Fe-Ga-Al-Y magnetostrictive film

摘要:

本文借助自行设计的磁场发生器,以铍青铜为衬底,采用离子束溅射沉积法在不同稳恒磁场环境下制备Fe-Ga-Al-Y MF样品,其成分为Fe74.34-79.33Ga11.45-13.73Al5.33-6.95Y3.27-4.36。采用原子力显微镜(AFM)与扫描电镜(SEM)观测Fe-Ga-Al-Y MF表面形貌,通过激光微位移传感器和交变梯度磁强计分别对薄膜样品的悬臂梁自由端偏转量与磁滞回线进行测定,研究Fe-Ga-Al-Y MF表面形貌以及成膜时外加稳恒磁场方向及大小对Fe-Ga-Al-Y MF磁性能的影响。研究结果表明：通过IBSD法制备的薄膜样品表面光滑平整,无明显的缺陷,薄膜组织结构均匀致密,具有优异的成膜质量。成膜时施加的稳恒磁场能调控薄膜的易磁化轴方向,Fe-Ga-Al-Y MF的易磁化轴方向与成膜时所施加的稳恒磁场方向一致；成膜时施加与衬底短轴方向平行的稳恒磁场,可以显著提高Fe-Ga-Al-Y MF的饱和磁致伸缩性能,且随着磁场的增大,薄膜的饱和磁致伸缩性能逐渐增加。薄膜面内(沿着x轴方向、y轴方向)的饱和磁化强度、矫顽力也随着磁场的增大而逐渐增大。

Abstract:

With the help of self-designed magnetic field generator,beryllium bronze as the substrate, Fe-Ga-Al-Y MF samples were prepared under different static magnetic field environments by ion beam sputter deposition, its composition is Fe74.34-79.33Ga11.45-13.73Al5.33-6.95Y3.27-4.36 .The surface morphology of Fe-Ga-Al-Y MF was observed by atomic force microscopy (AFM) and scanning electron microscopy (SEM). Deflection of cantilever and hysteresis loop of films were measured by laser micro-displacement sensor and alternating gradient magnetometer, respectively. The surface morphology of Fe-Ga-Al-Y MF and the effect of the direction and size of the static magnetic field applied during deposition on magnetic properties of the films were studied．The results showed that the thin film samples prepared by IBSD method have smooth surface, no obvious defects, and the structure of the thin film is uniform and compact.The easy magnetization axis direction of films can be regulated by static magnetic field applied during film formation. The easy magnetization axis direction of Fe-Ga-Al-Y MF was the same to the direction of the static magnetic field applied during film formation. When the direction of static magnetic field applied during film formation was parallel to the minor axis direction of the substrate, it can significantly improve the saturation magnetostrictive properties of the Fe-Ga-Al-Y MF. With the increase of magnetic field, the saturation magnetostriction coefficient of film has been continuously improved and the saturation magnetization , coercive force of the films within the film plane (along the x-axis direction, y-axis direction) gradually increased .