基于微柱状电极生长ZnO纳米线的研究

The laterial growth of ZnO nanowires network based on the micro-electrode

摘要:

利用自己开发的硅衬底电极无催化剂制备横向 ZnO 纳米线网的技术,实现了二维氧化锌纳米线网电路的制备。本论文涉及的技术一方面可以为突破纳电子器件制备极限提供新技术参考。另一方面,去除了纳米线生长过程中的金催化剂污染,降低成本,简化工艺。

Abstract:

Using the substrate with the unique nanometer column arrays, the two dimensional ZnO nanowires network circuit was realized by means of CVD method without catalyst. This work not only removed the catalyst contamination,simplified the process and reduced the cost of Snanowire’s production, but also offered the new technical reference for breaking through the nano electronic devices limit.