Co90Zr7Ta3三元合金微观组织及磁性能的研究

Study on Microstructure and magnetic properties of Co90Zr7Ta3 ternary alloy

摘要:

本文通过金相组织观察、XRD分析和透磁率检测，研究了Co90Zr7Ta3三元合金微观组织，并通过分析材料组织与透磁率(PTF, pass through flux)变化，得到热机械处理对透磁率的影响。实验结果表明：真空熔炼制备的Co90Zr7Ta3三元合金有大量枝晶组织，主要包含Co基体和枝晶结构的(Co,Ta)11Zr2。采用轧制及热处理后，合金内部枝晶结构破碎，发生球化。合金中Co基体中的fcc相转变为hcp相，hcp相中(0001)含量的增加提高了靶材透磁率。

Abstract:

In this paper, the microstructure of Co90Zr7Ta3 ternary alloy and the effect of microstructure on the PTF (pass through flux) were studied by means of metallographic observation, XRD analysis and PTF measurement. The influence of thermo mechanical treatment on the permeability was obtained by analyzing the structure and PTF of the material. The results show that the ternary alloy of Co90Zr7Ta3 prepared by vacuum melting mainly contains the precipitates of Co matrix and dendrite structure of (Co,Ta)11Zr2. After rolling and heat treatment, the dendrite structure in the alloy was broken to form dispersed precipitates. At the same time, the fcc phase in Co matrix is transformed into hcp phase, and the permeability of the target is improved by increasing the orientation of (0001) in hcp phase.