重复加工对单晶镍表面形貌及亚表面缺陷的影响

Influence of Tool Shape on Surface Quality of Monocrystalline Nickel Nanofabrication

摘要:

本文通过分子动力学模拟对重复纳米加工单晶镍中的表面形貌、亚表面损伤和刀具受力情况进行了分析。并通过纳米划痕实验适当验证了理论分析的结论。论文对加工中一系列原子的坐标进行追踪，揭示了重复加工时表面凹槽的形成及变化原因。通过共近邻分析和位错提取技术，得出在单晶镍纳米加工中，重复加工一次会对工件亚表面质量有所改善，而重复加工两遍则基本没有区别。同时，刀具在第一次加工中所受切向力和法向力明显较大，而之后的两次重复加工则刀具受力基本相同。采用原子力显微镜对纳米划痕实验后的单晶镍进行表面粗糙度检测，发现重复一次加工会适当的提高加工后工件表面质量。

关键词:单晶镍;分析动力学;纳米划痕;多次重复;表面形貌

Abstract:

In this work, research on the surface morphology, sub-surface damage and tool force in the repeated nanofabrication of monocrystalline nickel was conducted via molecular dynamics. And the conclusion of the theoretical analysis was properly verified by the nano-scratch experiment The paper traced the coordinates of a series of atoms during processing, revealing the formation of grooves on the surface and the reasons for the changes during repeated processing. Through CAN analysis and DXA technology, it was concluded that in monocrystalline nickel nano-processing, repeated processing once will improve the sub-surface quality of the workpiece, but there was basically no difference between repeated processing twice. At the same time, the tangential force and the normal force of the tool in the first machining were obviously larger, and the force of the tool was basically the same in the subsequent two repeated machining. The surface roughness of the single crystal nickel after the nano-scratch experiment was detected by an atomic force microscope, and it was found that repeated processing once would appropriately improve the surface quality of the processed workpiece.

Key words:monocrystalline nickel; molecular dynamics; Nanofabrication; Different Crystal Orientation; Surface roughness