氢化钛高温分解制高纯WTi合金

Preparation of High Purity WTi Alloy by TiH2 Decompose at High Temperature

摘要:

本研究分析TiH2高温分解释氢的特性，将其应用于高纯WTi合金靶材的热压成型制备中。讨论了热压过程工艺对烧结样品纯度及原料配比对烧结坯微观组织的影响，以金相显微镜、扫描电子显微镜（SEM）、碳硫分析、氧氮氢分析仪、辉光放电质谱法（GDMS）等检测WTi10样品的微观形貌及杂质含量。研究结果表明，随着TiH2在Ti成分中占比的提高，烧结出WTi合金的气体元素杂质含量减少；烧结WTi10合金的微观组织更趋均匀；W元素少无扩散至Ti基体内形成纤维状富钨相的倾向。课题研制出纯度99.9993%的超高纯WTi10靶材制品。

Abstract:

The decomposition of TiH2 at high temperature was studied, and it was applied in the manufacture of high purity WTi alloy. The effect of hot pressing sintering process on the purity of WTi10 speicmen was investigaed. Microstructures by different raw material ratios were investigated, too. Optical microscope, Scanning electron microscope (SEM), CS analyzer, ONH analyzer and Glow discharge mass spectrometry (GDMS) were used to analyze the microstructure and impurities of the WTi10 specimens. The results indicate that with the increase of the ratio of TiH2 to Ti, the lower impurity of C,S,O,N,H more uniform distributed microstructure, and much less diffusion of W to Ti matrix. The purity of WTi10 products is up to 99.9993%.