磁控共溅射制备镱铜及镱铜铝非晶合金薄膜

Preparation of ytterbium-copper and ytterbium-copper-aluminum amorphous films by magnetron co-sputtering

摘要:

稀土基非晶合金是金属玻璃的重要成员，但由于稀土元素高的活性和金属玻璃苛刻的制备要求导致相关研究进展缓慢，目前新体系非晶合金的制备仍然采用试错的原始方法。本文基于高通量材料基因工程，通过倾斜靶和调控单金属靶功率制备了化学组成连续变化的镱-铜（Yb-Cu）非晶合金金属薄膜，从而快速筛选出非晶形成范围，并且成功制备出YbCu非晶合金薄膜，同时研究了铝对YbCu非晶合金形成的影响，制备了YbCuAl非晶薄膜。当Yb小于44.5～46.5 wt%时薄膜全部为非晶态。AFM结果表明YbCu非晶合金表面光滑无缺陷，高度绝对差仅为31.6 nm，薄膜呈现疏水性，最大疏水角为119°。YbCu和YbCuAl非晶薄膜最大方阻分别为551 mΩ □-1和1738 mΩ □-1，合金元素Al对YbCu非晶薄膜性能产生了显著影响。YbCu(Al)非晶薄膜的成分筛选和制备加快了稀土基非晶新材料的开发。

Abstract:

Amorphous alloy is a new type of multicomponent alloy material which is different from common metal materials, in which rare earth-based amorphous alloy is an important member of metallic glass family. However, due to the high activity of rare earth elements and stringent preparation requirements of metallic glass, the related research progress is slow, and the research of new system amorphous alloy still adopts a large number of original methods of trial and error. In this paper, based on the concept of high-throughput material genetic engineering, metal thin films with continuous change of chemical composition were prepared by tilting target and adjusting single metal target power, so as to quickly screen the composition range of YbCu amorphous alloy, and successfully prepared YbCu amorphous alloy film for the first time. At the same time, the influence of aluminum on the formation of YbCu amorphous alloy was studied and prepared YbCuAl amorphous films were prepared. When the Yb is less than 44.5-46.5 wt%, the films are all amorphous. The results show that the surface of YbCu amorphous alloy is smooth without defects, and the absolute height difference is only 31.6 nm. The film is hydrophobic with a maximum hydrophobic angle of 119 °. In addition, the maximum square resistance of YbCu and YbCuAl amorphous films is 551 mΩ □-1 and 1738 mΩ □-1, respectively. The alloying element Al has a significant effect on the properties of YbCu amorphous films. Therefore, the composition screening and successful preparation of YbCu(Al) amorphous films accelerate the development of rare earth based amorphous materials.