磁控溅射沉积银薄膜/涂层的研究进展

Research progress of silver films / coatings deposited by magnetron sputtering

摘要:

银薄膜/涂层是一种在高新技术领域极具潜力的新材料,近年来在现代工业中得到了广泛的应用。采用磁控溅射制备的银薄膜/涂层具有优异的附着力,通过选择相应的沉积参数可以实现对银薄膜/涂层微观结构及性能的调控。本文综述了磁控溅射沉积银薄膜/涂层的主要制备工艺,评述了银薄膜/涂层在其主要应用领域内的研究进展,并对其未来的发展进行了展望。

Abstract:

Silver films / coatings is a kind of new material with great potential in the field of high and new technology, and has been extensively used in modern industry in recent years.SThe silver thin films/coatings prepared by magnetron sputtering have excellent adhesion. The microstructure and properties adjustment of silver thin films/coatings can be achieved by selecting appropriate deposition parameters.SIn this paper, the main preparation methods of silver thin films/coatings deposited by magnetron sputtering are summarized the research progress of silver thin films/coatings in its main application fields is reviewed, and the future development of silver thin films is prospected.