含类金刚石薄膜的镁铝合金振膜的制备及其声学特性研究

Preparation and Acoustic Characteristics of Magnalium Diaphragmwith DLC Coating

摘要:

本研究通过脉冲等离子体增强化学气相沉积技术,在镁铝合金振膜上沉积类金刚石(Diamond-like carbon, DLC)薄膜。利用SEM、RAMAN和AFM表征了不同沉积工艺的DLC薄膜的形态和组成结构,测试了含DLC膜层的镁铝合金复合振膜的力学性能,相比镁铝合金振膜基底,DLC薄膜使得复合振膜在表面粗糙度、硬度和弹性模量方面有较多改善。通过研究含DLC薄膜的镁铝合金复合振膜的频率响应曲线和谐波失真等声学性能,复合振膜提升了频响上限,赋予了扬声器高保真性。采用含DLC膜层的镁铝合金复合振膜制成的音响设备,具有良好的音色自然度、声场表现度、人声表现度和整体评价度,能够有效提高人类主观听音效果。

Abstract:

In this study, the diamond-like carbon (DLC) coating was deposited on magnalium diaphragm by pulsed plasma enhanced chemical vapor deposition technology. The morphology and composition of the DLC coating deposited by different processes were characterized by SEM, RAMAN and AFM, and the mechanical properties of magnalium diaphragm with DLC coating were studied. Compared with magnalium diaphragm, the DLC coating improved the surface roughness, hardness and elasticity modulus. The frequency response curve and harmonic distortion showed that the DLC coating increased the upper limit of frequency response and imparts high fidelity to the loudspeaker. Audio equipment fabricated with magnalium diaphragm with DLC coating had good timbre naturalness, sound field expression, vocal performance and overall evaluation, which can effectively improve the human subjective listening effect.