Ar/N2-Ar共溅射Ti掺杂对Ta2O5 涂层光学和力学性能的影响

Effect of Ar/N2-Ar Co-sputtering Ti Doping on Optical and Mechanical Properties of Ta2O5 Coatings

摘要:

为了探索Ar/N₂-Ar共溅射Ti掺杂对Ta₂O₅涂层光学性能和力学性能的影响，采用射频和直流磁控共溅射技术在玻璃基底表面制备了Ta₂O₅、N₂-Ta₂O₅、Ti-Ta₂O₅和N₂-Ti-Ta₂O₅涂层。利用X射线衍射仪（XRD）、扫描电子显微镜（SEM）、原子力显微镜（AFM）表征了Ta₂O₅、N₂-Ta₂O₅、Ti-Ta₂O₅和N₂-Ti-Ta₂O₅涂层的微观结构和表面形貌；通过紫外可见分光光度计测试了涂层的光学参数；采用纳米压痕仪测试了涂层的硬度和杨氏模量。XRD测试结果表明，Ta₂O₅、N₂-Ta₂O₅、Ti-Ta₂O₅和N₂-Ti-Ta₂O₅涂层主要以Ta₂O₅为主体的非晶相结构组成。SEM和AFM结果显示，沉积在玻璃基底上的涂层未出现大面积空隙，溅射粒子在基底表面均匀堆积生长，并且涂层沉积厚度基本一致，厚度误差在5%以内。分别引入N₂和Ti及N₂-Ti共掺杂，均可降低Ta₂O₅涂层的粗糙度。光学测试结果表明，分别引入N₂和Ti元素，可以提高Ta₂O₅涂层的平均透射率至81%以上，而N₂-Ti共掺杂制备的N₂-Ti-Ta₂O₅涂层平均透射率降低。力学测试结果显示，与Ta₂O₅涂层对比，N₂-Ta₂O₅和N₂-Ti-Ta₂O₅涂层的硬度显著增大，Ti-Ta₂O₅涂层硬度基本一致。弹性指数（H/E）和塑性指数（H³/E²）表明，N₂-Ta₂O₅涂层和N₂-Ti-Ta₂O₅涂层具备更好的断裂韧性和抗塑性变形能力。在玻璃表面制备Ta₂O₅掺杂N₂和Ti元素的涂层，可以实现以N₂-Ta₂O₅涂层和N₂-Ti-Ta₂O₅涂层为代表的、同时具备优异光学性能和力学性能的多功能涂层。

关键词:磁控溅射;N₂-Ti-Ta₂O₅;涂层;光学性能;力学性能

Abstract:

In order to explore the effects of Ti doping on the optical and mechanical properties of Ta₂O₅ coatings prepared by Ar/N₂-Ar co-sputtering, Ta₂O₅, N₂-Ta₂O₅, Ti-Ta₂O₅, and N₂-Ti-Ta₂O₅ coatings were prepared on the glass substrate surface by radio frequency and direct current magnetron co-sputtering techniques. The microstructures and surface morphologies of Ta₂O₅, N₂-Ta₂O₅, Ti-Ta₂O₅, and N₂-Ti-Ta₂O₅ coatings were characterized by X-ray diffraction (XRD), scanning electron microscope (SEM), and atomic force microscope (AFM). The optical parameters of the coatings were tested by ultraviolet-visible spectrophotometry. The hardness and Young's modulus of the coatings were tested by nanoindentation. XRD test results show that the Ta₂O₅, N₂-Ta₂O₅, Ti-Ta₂O₅, and N₂-Ti-Ta₂O₅ coatings mainly consist of amorphous phase structure with Ta₂O₅ as the main body. SEM and AFM results show that the coatings deposited on the glass substrate do not have extensive voids. The sputtered particles are uniformly piled and grow on the substrate surface. The coating thicknesses are basically the same and the thickness error is within 5%. The separate introduction of N₂, Ti, and N₂-Ti co-doping can reduce the roughness of Ta₂O₅ coatings. The optical test results show that the separate introduction of N₂ and Ti element can increase the average transmittance of Ta₂O₅ coatings to more than 81%, whereas the average transmittance of N₂-Ti-Ta₂O₅ coatings prepared by N₂-Ti co-doping reduces. Mechanical test results show that compared with that of Ta₂O₅ coating, the hardness of N₂-Ta₂O₅ and N₂-Ti-Ta₂O₅ coatings increases significantly. The hardness of Ti-Ta₂O₅ coatings is basically the same. The elasticity index (H/E) and plasticity index (H³/E²) indicate that the N₂-Ta₂O₅ and N₂-Ti-Ta₂O₅ coatings possess better fracture toughness and plastic deformation resistance. The preparation of N₂- and Ti-doped Ta₂O₅ coatings on glass surface can obtain the multifunctional coatings with both excellent optical and mechanical properties, which is represented by N₂-Ta₂O₅ and N₂-Ti-Ta₂O₅ coatings.

Key words:magnetron sputtering;N₂-Ti-Ta₂O₅;coating;optical properties;mechanical properties