Ti掺杂Ta2O5高透光涂层抗冲蚀性能及损伤演变

Erosion Resistance and Damage Evolution of Ti-doped Ta2O5 High-Transmittance Coatings

摘要:

为了验证Ti掺杂Ta₂O₅涂层（TTO）的耐磨特性和抗冲蚀性能，采用磁控溅射技术并通过控制Ti靶功率制备了一系列TTO涂层。研究了TTO涂层在不同Ti靶功率下的生长结构、组织形貌及摩擦学特性。冲蚀试验后，进一步分析了TTO涂层在不同冲蚀条件下，冲蚀损伤行为随力学特性的变化规律。结果表明，TTO涂层在生长过程中由于吸附原子的迁移消除了材料中的粗糙度、空隙和缺陷， 获得了平整致密的光滑表面。摩擦学试验表明，TTO涂层主要表现为塑性变形和微裂纹的磨损机制。较高的Ti靶功率可以提升TTO涂层的耐磨性。冲蚀试验结果表明，冲击坑、犁沟、微切削、脆性剥落和裂纹的形成为TTO涂层样品在冲蚀作用下的主要磨损机制。

Abstract:

To verify the wear resistance and erosion resistance of Ti-doped Ta₂O₅ coating (TTO), a series of TTOs were prepared by magnetron sputtering technology by controlling the power of the Ti target. The change of growth structure, microstructure, and tribological properties of TTOs with Ti target power was studied. After the erosion test, the variation of erosion damage behavior of TTOs with mechanical properties under different erosion conditions was further studied. The results show that the TTOs eliminate the roughness, voids, and defects in the material due to the mobility of the adsorbed atoms during the growth process, and a flat and dense smooth surface is obtained. Tribological tests show that the TTOs are mainly characterized by plastic deformation and microcrack wear mechanism. Higher Ti target power can improve the wear resistance of TTOs. Erosion test results reveal that the impact crater, furrow, micro-cutting, brittle spalling, and crack formation are the main wear mechanisms of the TTOs samples under erosion conditions.