沉积时间和靶电流比例对磁控溅射TiAlN涂层耐磨性的影响研究

Research on Influences of Sedimentation Time and Target Current Ratio on Wear Resistance of Magnetron Sputtering TiAlN Coating

摘要:

采用磁控溅射工艺在WC-8Co硬质合金基体表面制备了一层厚度分别为2.5μm、3μm和3.5μm的TiAlN涂层,并制备了不同Ti、Al比例的TiAlN涂层,利用摩擦磨损机考察了涂层的承载能力和摩擦学性能,通过扫描电子显微镜观察了磨损试件的表面形貌,通过摩擦系数和显微组织的演变来评价不同成分和不同厚度TiAlN涂层的摩擦学性能。结果表明,随着涂层厚度的增加,涂层的摩擦系数降低,涂层更不易被磨穿,表明在一定范围内增加涂层厚度有利于提高涂层的耐磨损性能；涂层的成分发生改变时,由于Ti、Al元素的共同作用,呈现不同的摩擦性能,当TiAl比例为50：50时,涂层的耐磨性最好。

Abstract:

A TiAlN coating on the surface of a WC-8Co cemented carbide matrix with thicknesses ranging from 2.5 to 3.5 μm and different ratios of TiAl composition was manufactured by means of magnetron sputtering. The carrying capacity and tribological properties of the coating were investigated on a friction-wear testing machine; the microstructure of the coating was observed by using scanning electron microscopy. The tribiological properties of TiAlN coatings of different composition and thickness were evaluated through the friction coefficient and the evolution of microstructure. The results show that when the coating thickness increases, the friction coefficient decreases, and the coating will not easily wear out, suggesting that it is beneficial to improve the wear resistance of a coating by increasing its thickness in a certain range. If the composition of the coating changes, its friction performance will vary due to the different effects of Ti and Al. is 50:50, the wear resistance of the coating is best.