利用FCVA法和CO2、N2制备Ti(C,O,N)纳米复合薄膜的研究

The study of Ti(C, N, O) nanocomposite films fabricated by Filtered Cathodic Vacuum Arc using CO2 and N2 as precusors

摘要:

使用CO2和N2利用磁过滤阴极弧法（FCVA）在Si（100）和304不锈钢上沉积Ti(C,N,O)薄膜。采用XPS, XRD, Raman, SEM, 摩擦磨损试验机，电化学实验站检测得出气体流速对薄膜成分、相结构和薄膜性能的作用。当混合气体流量从10sccm升高的50sccm时，薄膜中的C和N含量有明显增加，而O和Ti含量有小幅下降；当混合气体流量从50sccm升高到80sccm时，薄膜中的C和N含量下降，而Ti含量有小幅上升，O含量急剧上升。薄膜由nc-Ti(C,N,O)纳米晶结构，转变为nc-Ti(C,N,O)/a-CNx，a-TiO2/a-CNx,N-doped a-TiO2/a-C纳米复合结构。N-doped a-TiO2/a-C纳米复合结构薄膜具有最低的摩擦系数（0.34），nc-Ti(C,N,O)/a-CNx，N-doped a-TiO2/a-C纳米复合结构薄膜在Hanks溶液中均表现出良好的抗腐蚀能力。

Abstract:

Ti(C,N,O) films were deposited on Si (100), 304 stainless steel by Filtered Cathodic Vacuum Arc (FCVA) using CO₂ and N₂ (with ratio of 1:1) as precusors. The effect of gas flow rate on the composition, phase structure and properties of films was investigated by XPS, XRD, Raman, SEM, Tribological Test and Electrochemical workstation. The contents of C and N increase obviously, while contents of O and Ti decrease slightly as the gas flow rate increasing from 10sccm to 50sccm. The contents of C and N decrease, while content of Ti increases slightly and content of O increases dramatically as the gas flow rates from 50sccm to 80sccm. The phase structure of Ti(C,N,O) films transformed from nc-Ti(C,N,O) nanocrystal structure to nc-Ti(C,N,O)/a-CNx nanocomposite structure, a-TiO₂/a-CN_x and N-doped a-TiO₂/a-C nanocomposite structure as gas flow rate increasing from 10sccm to 80sccm. The N-doped a-TiO₂/a-C nanocomposite showed the lowest friction coefficient. Both nc-Ti(C,N,O)/ a-CN_x nanocomposite structure and N-doped a-TiO₂/a-C nanocomposite structure showed good anticorrosion ability in Hanks balance solution.