直流溅射沉积CrN薄膜组织结构与摩擦性能分析研究

Microstructure and Tribological Properties of CrN Films Deposited by Direct Current Magnetron Sputtering

摘要:

采用直流反应溅射在304不锈钢表面沉积CrN薄膜。利用X射线衍射仪（XRD），扫描电子显微镜（SEM），原子力显微镜（AFM），显微硬度计，磨损试验机与三维轮廓仪等表征氮气流量对CrN薄膜组织结构与摩擦性能的影响。研究结果表明，随着氮气流量的增加，CrN (200)晶面呈择优取向，薄膜的沉积速率随着氮气流量的增加逐渐降低。另外，薄膜的表面粗糙度随着氮气流量的增加呈先降低后增加的趋势。随着氮气流量从15 sccm增加至30 sccm时，薄膜的显微硬度先从527.34 HV增加至1042.26 HV，当氮气流量再增加至35 sccm时，薄膜的显微硬度却降低至918 HV。磨损试验表明，当氮气流量为30 sccm 时薄膜具有最小的摩擦系数0.93和磨损率2.02×10-15m3·(N·m)-1，显示最佳的磨损性能。

Abstract:

CrN films were deposited on 304 stainless steel by DC reactive magnetron sputtering. The effects of nitrogen flow on the microstructure, mechanical and tribological properties were characterized by X-ray diffraction, scanning electron microscopy, atom force microscope, microhardness, wear tester and Nanomap 500LS profile. The results showed that with the increase of nitrogen flow, the CrN films exhibited a preferential orientation in the (200) direction. The deposition rate of CrN films decrease with the increase of nitrogen flow. Besides, the surface roughness exhibited the tendency of decrease first and then increase with further increase of nitrogen flow. As nitrogen flow increased from 15 to 30 sccm, microhardness was improved from 527.34 HV to 1042.26 HV, and then decrease to 918 HV when the nitrogen flow further increase to 35 sccm. Wear test showed that the CrN films deposited at nitrogen flow of 30 sccm was achieved lowest friction coefficient with 0.93 and wear rate with 2.02×10-15m3·(N·m)-1, which presented best wear resistance performance.