Deposition of SmS Optical Thin Films by Double-Target Sputtering

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Deposition of SmS Optical Thin Films by Double-Target Sputtering
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                        Huang Jianfeng,Cao LiyunHuang Jianfeng,Cao Liyun

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Key words:SmS thin film,double-target sputtering,optical thin film,

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[1]Huang Jianfeng,Cao Liyun.Deposition of SmS Optical Thin Films by Double-Target Sputtering[J].Rare Metal Materials and Engineering,2004,33(3):333-336.

[2]Luo Weigen Ding Aili Zhang Ruitao Huang Yuhong Ge Ming.Deposition and Properties of PLT Thin Films by Magnetron Sputtering[J].Journal of Inorganic Materials,1992,7(2):176-182.

[3]黄剑锋,曹丽云,熊信伯,沈清,罗宏杰,金平.XRD Analysis of SmS Thin Films Deposited by Sputtering[J].Journal of Wuhan University of Technology,2003,25(5):23-26.

[4]YU Yi,ZHAO Hong-jin,GAO Zhan-you,REN Tian-ling,LIU Li-tian.Deposition of AlN Thin Films on Silicon by DC Magnetron Reactive Sputtering[J].Piezoelectrics & Acoustooptics,2005,27(1):53-55.

[5]YANG Dong-hua.On the Technological Parameters Deposition of Al Thin Films by DC Magnetron Sputtering[J].Journal of Chongqing University of Technology(Natural Science),2006,20(8):69-71,86.

[6]CHENG Song-hua,ZENG Xiang-bin.In Situ Deposition of C-axis Oriented ZnO Thin Films by RF Magnetron Sputtering[J].Semiconductor Optoelectronics,2007,28(1):60-63.

[7]Wenjie ZHANG,Ying LI,Fuhui WANG.Properties of TiO2 Thin Films Prepared by Magnetron Sputtering[J].Journal of Materials Science & Technology,2002,18(2):101-107.

[8]ZHU Yunlong,SUN Fang,JIANG Hongwei,XIAO Shicheng.Preparation and Microstructure of Cu Thin Films by Magnetron Sputtering[J].Plating & Finishing,2022,44(3):29-34.

[9]Xun Chi,Changhong Song,Junfeng Bao,Zhi Gao,Xinming Ren,Beiyue Ma.Research Progress of Titanium-based Thin Films Prepared by Magnetron Sputtering[J].Thermal Spray Technology,2020,12(2):17-21.

[10]Li Tao,Gu Hongwei,WANG Peiwen,Wang Xiaoping,Xie Bowei.Preparation of Large Area Double Sided YBCO Thin Films by DC Magneton Sputtering[J].Journal of Rare Earths,2004,22(Z1).

[11]SI Lei,WANG Yuxia,LIU Guojun.Deposition Techniques for Optical Thin Films[J].Journal of Changchun University of Science and Technology,2004,27(2):37-40.

[12]LI Ning,SHAO Hong-hong.Deposition of BN Films by Radio Frequency Magnetron Sputtering[J].Materials For Mechanical Engineering,2006,30(11):15-17.

[13]Li Hui, Luo weigen, Chem Xiantong, Ding Aili.Preparation of Nanocrystalline PLT Thin Films by RF Magnetron Sputtering[J].Journal of Inorganic Materials,1994,9(3):371-374.

[14]王立铎贺小明.Structure Analysis of Teflon Films Synthesized by Ion Beam Sputtering Deposition[J].Journal of Functional Materials,1997,28(6):660-661,655.

[15]YANG Lina,DING Zengqian,LI Ruiying,ZHOU Boyi,XIONG Kanglin,FENG Jiagui,ZHANG Yonghong.Deposition of Niobium Films by Ultra-High-Vacuum Magnetron Sputtering[J].JOurnal of Vacuum Science and Technology,2021,41(7):607-612.

[16]Zhao Fanghong,Zhuang Daming,Zhang Gong,Zha Shan.Influence of Target Power Density on Ga-Doped ZnO Thin Films Prepared by Middle-Frequency Alternative Magnetron Sputtering[J].JOurnal of Vacuum Science and Technology,2005,25(3):222-224,237.

[17]ZHU Minghai,CHEN Guangbin,FENG Yu,GONG Nan,WANG Jianbo.Research on Magnetron Sputtering of Ti-Zn-O Composite Thin Films and Its Optical Property[J].Journal of Changchun University of Science and Technology,2014(1):48-51.

[18]WANG Bo,WEI Shi-cheng,WANG Yu-jiang,GUO Lei,LIANG Yi,PAN Fu-sheng and XU Bin-shi.Titanium-oxide Thin Films Prepared by Magnetron Sputtering Method[J].Surface Technology,2018,47(8):257-264.

[19]X. S. Miao,Y. C. Chan,Z. Y. Lee.Optical Properties and Reactive Sputtering Conditions of AIN and AlSiN Thin Films for Magneto- Optical Applications[J].Journal of Electronic Materials,1997,26(1):21-24.

[20]Lu Jiafu Yu Daiwei Fang Ziyao.Optical Properties of Te-O Sputtering Thin Films[J].Journal of Inorganic Materials,1990(2).

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[Huang Jianfeng, Cao Liyun. Deposition of SmS Optical Thin Films by Double-Target Sputtering[J]. Rare Metal Materials and Engineering,2004,33(3):333~336.]
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