Reliability of Micro/Nano-Electromechanical System in Environment of Electrostatic Field, Casimir Force and Residual Stress

Abstract:

As electric field is applied, the behaviors of micro / nano-electromechanical systems become complicated due to the unavoidable mutual actions of Casimir force, residual stresses and electrostatic force in the system. Analytical expressions of the deflection of a bridge shaped device under the mutual actions of these forces in the systems are derived. It is shown that the rather great tensile residual stress enhances wavy behavior of the deflection.