Effect of Annealing on Structure and Photoluminescence Characters of SnO2:Sb Thin Films

Abstract:

The SnO2:Sb films was prepared on glass substrates by rf magnetron sputtering method. The effect of different doping content and annealing on structure of the thin films were investigated. Result show that the prepared samples are polycrystalline thin films with rutile structure of pure SnO2 and have orientation of (110) direction. The crystallization of the samples changes with the different doping content and annealing conditions. The photoluminescence of the samples was measured at room temperature. For the first time, a UV-violet luminescence peak near 392 nm was observed, and the luminescence mechanism was also tentatively investigated.