Tribological Characterization of Ti-Si-N Nano Films Prepared by Reactive Magnetic Sputtering
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[Niu Xinping, Wang Xin, Ma Shengli, Xu Kewei, Liu Weimin. Tribological Characterization of Ti-Si-N Nano Films Prepared by Reactive Magnetic Sputtering[J]. Rare Metal Materials and Engineering,2005,34(12):1882~1885.] DOI：[doi]