Characterization of the Resistivity and Nanoindentation Hardness of Cu-Zr/ZrN Films
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[Bai Xuanyu, Wang Yuan, Xu Kewei. Characterization of the Resistivity and Nanoindentation Hardness of Cu-Zr/ZrN Films[J]. Rare Metal Materials and Engineering,2005,34(2):259~262.] DOI：[doi]